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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10392702 B1

PDFFull Text
Date of Patent:
Aug. 27, 2019

Filed:

Jul. 19, 2016

Substrate processing apparatus

Applicant:

Eugene Technology Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;

Inventors:

Woo Duck Jung, Suwon-Si, KR;

Kyu Jin Choi, Yongin-Si, KR;

Song Hwan Park, Yongin-Si, KR;

Seong Min Han, Yongin-si, KR;

Sung Ha Choi, Yongin-Si, KR;

Assignee:

EUGENE TECHNOLOGY CO., LTD., , KR;

Attorney:

Renaissance IP Law Group LLP

Primary Examiner:

Joseph A Miller, Jr

Int. Cl.
CPC ...
H01L 21/673 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45563 (2013.01); C23C 16/4412 (2013.01); C23C 16/45504 (2013.01); H01L 21/67109 (2013.01); H01L 21/67303 (2013.01); H01L 21/67309 (2013.01);
Abstract

Provided is a substrate processing apparatus, and more particularly, a batch-type substrate processing apparatus where processes can be performed independently on a plurality of substrates. The substrate processing apparatus includes a substrate boat including a plurality of partition plates and a plurality of connection rods, an internal reaction tube, a gas supply unit, and an exhaust unit, and a plurality of substrates are loaded to be separated from the partition plates.

Find Patent Forward Citations

Jung, Woo. (2019). Substrate processing apparatus (U.S. Patent No. 10392702). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10392702

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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