Kumamoto, Japan

Soichiro Okada

USPTO Granted Patents = 5 

Average Co-Inventor Count = 3.1

ph-index = 1

Forward Citations = 5(Granted Patents)


Location History:

  • Koshi, JP (2017)
  • Kumamoto, JP (2015 - 2021)

Company Filing History:


Years Active: 2015-2025

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5 patents (USPTO):Explore Patents

Title: Inventor Soichiro Okada: Pioneering Substrate Treatment Methods

Introduction

Soichiro Okada is an accomplished inventor based in Kumamoto, Japan, known for his significant contributions to substrate treatment technology. With a total of five patents to his name, Okada has dedicated his career to advancing innovation within the semiconductor industry, particularly through his role at Tokyo Electron Limited.

Latest Patents

Soichiro Okada's latest patents exhibit his expertise in substrate treatment methods. One of his notable inventions is a substrate treatment method and system that involves a careful determination of which treatment to apply—either decreasing or increasing the polarity of a base film on a substrate surface. This method enhances the effectiveness of resist solution application, a crucial step in semiconductor manufacturing. Another significant patent is his mask forming method that combines selective exposure and post-exposure baking techniques to create regions with distinct functional groups in a photosensitive organic film. This inventive process ultimately leads to the removal of unwanted regions via a salt dissolving developer, showcasing Okada's innovative approach to masking techniques in semiconductor production.

Career Highlights

Throughout his career, Soichiro Okada has played a vital role at Tokyo Electron Limited, a leading international company in the semiconductor and electronics sectors. His work focuses on developing cutting-edge technologies that improve substrate treatment processes, showcasing his commitment to advancing the field through practical and innovative solutions.

Collaborations

In addition to his remarkable inventions, Soichiro Okada collaborates with esteemed colleagues in his field. Notably, he has worked alongside Hidetami Yaegashi and Kousuke Yoshihara, sharing ideas and expertise that contribute to their groundbreaking research and development efforts in the semiconductor industry.

Conclusion

Soichiro Okada's contributions to substrate treatment technology reflect his dedication to innovation and excellence. With a solid portfolio of patents and collaborative efforts, he continues to make significant strides in improving semiconductor manufacturing processes, establishing himself as a key figure within the industry. As technology evolves, Okada's inventive spirit and expertise will undoubtedly shape the future of substrate treatment advances.

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