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Fremont, CA, United States of America

Siyuan Tian

USPTO Granted Patents = 9 (Patent Applications = 6)

Average Co-Inventor Count = 1.7

ph-index = 1

Forward Citations = 4(Granted Patents)

Location History:

Fremont, CA (US) (2019 - 2024)
Newark, CA (US) (2024)

Company Filing History:

Lam Research Corporation

Years Active: 2019-2025

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9 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12308265 - RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system (2025-05-20),

2. 12154814 - Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array (2024-11-26),

3. 12077862 - Connector for substrate support with embedded temperature sensors (2024-09-03),

4. 11869794 - Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array (2024-01-09),

5. 11791189 - Reflectometer to monitor substrate movement (2023-10-17),

6. 11430688 - Two-stage pin lifter for de-chuck operations (2022-08-30),

7. 10957520 - Long-life high-power terminals for substrate support with embedded heating elements (2021-03-23),

8. 10851458 - Connector for substrate support with embedded temperature sensors (2020-12-01),

9. 10522377 - System and method for substrate support feed-forward temperature control based on RF power (2019-12-31),

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