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Fremont, CA, United States of America

Siyuan Tian

This inventor holds 10 USPTO granted patents and 7 published patent applications. Top assignee: Lam Research Corporation. Active years: 2019-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Siyuan Tian. Retrieved from https://idiyas.com/inventor/siyuan-tian-zuike2mq

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 10 (Patent Applications = 7)

% Patents Active = 100.0

Average Co-Inventor Count = 1.8

ph-index = 1

Forward Citations = 5(Granted Patents)

Location History:

Fremont, CA (US) (2019 - 2024)
Newark, CA (US) (2024)

Company Filing History:

10 out of 3,955

Lam Research Corporation

Years Active: 2019-2026

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12604703 - Wafer chuck with thermal tuning cavity features (2026-04-14),

2. 12308265 - RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system (2025-05-20),

3. 12154814 - Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array (2024-11-26),

4. 12077862 - Connector for substrate support with embedded temperature sensors (2024-09-03),

5. 11869794 - Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array (2024-01-09),

6. 11791189 - Reflectometer to monitor substrate movement (2023-10-17),

7. 11430688 - Two-stage pin lifter for de-chuck operations (2022-08-30),

8. 10957520 - Long-life high-power terminals for substrate support with embedded heating elements (2021-03-23),

9. 10851458 - Connector for substrate support with embedded temperature sensors (2020-12-01),

10. 10522377 - System and method for substrate support feed-forward temperature control based on RF power (2019-12-31),

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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