The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2024

Filed:

Nov. 03, 2020
Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Siyuan Tian, Fremont, CA (US);

Donald J. Miller, Hayward, CA (US);

Assignee:

LAM RESEARCH CORPORATION, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/46 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); G01K 7/00 (2006.01); H01L 21/67 (2006.01); H05B 3/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/46 (2013.01); C23C 16/4583 (2013.01); G01K 7/00 (2013.01); H01L 21/67103 (2013.01); H05B 3/02 (2013.01);
Abstract

An electrical connector includes first, second, third, and fourth electrical conductors. The first, second, third, and fourth electrical conductors each include a first end to be electrically connected to a respective electrically conductive pad formed on a surface of a ceramic layer of a substrate support and a second end to be electrically connected to a respective wire within a through hole in the substrate support. The electrical connector also includes a retainer to hold the first, second, third, and fourth electrical conductors in place.


Find Patent Forward Citations

Quick Actions:

Tian, Siyuan. (2024). Connector for substrate support with embedded temperature sensors (U.S. Patent No. 12077862). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12077862

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