Sunnyvale, CA, United States of America

Siew Neo

USPTO Granted Patents = 7 

Average Co-Inventor Count = 5.1

ph-index = 3

Forward Citations = 51(Granted Patents)


Company Filing History:


Years Active: 2018-2025

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7 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Siew Neo

Introduction

Siew Neo is a prominent inventor based in Sunnyvale, CA. He has made significant contributions to the field of technology, particularly in the area of metal deposition processes. With a total of 7 patents to his name, Neo has demonstrated a commitment to advancing innovation in his field.

Latest Patents

One of Siew Neo's latest patents is a method for preventing line bending during the metal fill process. This invention provides methods and apparatuses for reducing line bending when depositing metals such as tungsten, molybdenum, ruthenium, or cobalt into features on substrates. The process involves periodically exposing the feature to nitrogen, oxygen, or ammonia during atomic layer deposition, chemical vapor deposition, or sequential chemical vapor deposition. This technique aims to reduce interactions between the metal deposited onto the sidewalls of a feature, making it particularly suitable for deposition into V-shaped features.

Career Highlights

Throughout his career, Siew Neo has worked with notable companies such as Lam Research Corporation and Alta Devices, Inc. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the semiconductor industry.

Collaborations

Siew Neo has collaborated with talented individuals in his field, including coworkers Joshua Collins and Hanna Bamnolker. These collaborations have fostered an environment of innovation and creativity, leading to the development of advanced technologies.

Conclusion

Siew Neo's contributions to the field of technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for future innovations.

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