Company Filing History:
Years Active: 1993-2000
Title: Innovations by Sien G Kang
Introduction
Sien G Kang is a notable inventor based in Tracy, California, recognized for her contributions to the field of chemical vapor deposition (CVD) technology. With a total of five patents to her name, she has made significant advancements in minimizing stress in tungsten and tungsten silicide films during deposition processes.
Latest Patents
Sien G Kang's latest patents include innovative methods and apparatus designed to minimize as-deposited stress in tungsten. One of her key inventions involves processing substrates in a CVD reactor system where tungsten silicide is deposited. This process utilizes preflow and postflow of reducing gases before and after deposition steps to prevent the deposition of tungsten-rich films at the interface of the tungsten silicide film and the substrates. Additionally, for systems equipped with a remote gas injection and flow control system, an isolation valve is integrated into the gas supply manifold, which remains closed during specific intervals between deposition sequences.
Career Highlights
Throughout her career, Sien G Kang has demonstrated a commitment to innovation in the semiconductor industry. Her work has not only advanced the understanding of CVD processes but has also contributed to the development of more efficient manufacturing techniques for electronic components.
Collaborations
Sien G Kang has collaborated with esteemed colleagues such as Johannes J Schmitz and Raymond L Chow, further enhancing her research and development efforts in the field.
Conclusion
Sien G Kang's contributions to the field of CVD technology exemplify her dedication to innovation and excellence. Her patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, making her a valuable asset to the industry.