Shuping Hu

Title: Shuping Hu: Innovator in Photolithography Technology

Introduction

Shuping Hu is a notable inventor based in Shanghai, China. He has made significant contributions to the field of photolithography, particularly through his innovative designs and methods. His work is essential in advancing the technology used in semiconductor manufacturing.

Latest Patents

Shuping Hu holds a patent for a "Lithography machine workpiece table and vertical position initialization method thereof." This invention features a fine-motion module designed for use in a wafer stage of a photolithography tool. The module includes a base, a fine-motion plate, and several vertical motors fixed between the base and the fine-motion plate. Additionally, it incorporates gravity compensators and both absolute and relative position sensors to ensure precise control and positioning of the fine-motion plate.

Career Highlights

Shuping Hu is currently employed at Shanghai Micro Electronics Equipment (Group) Co., Ltd. His role at this leading company allows him to work on cutting-edge technologies that are crucial for the semiconductor industry. His expertise in photolithography has positioned him as a key player in the development of advanced manufacturing equipment.

Collaborations

Shuping collaborates with talented individuals in his field, including Feihong Liao and Yuebin Zhu. These partnerships enhance the innovation process and contribute to the successful development of new technologies.

Conclusion

Shuping Hu's contributions to photolithography technology exemplify the importance of innovation in the semiconductor industry. His patent and work at Shanghai Micro Electronics Equipment highlight his role as a significant inventor in this field.