This inventor holds 1 USPTO granted patent. Top assignee: Promos Technologies, Inc. Active years: 2002.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2002
Title: Innovations of Shuo-Yen Tai in Semiconductor Technology
Introduction
Shuo-Yen Tai is a notable inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative methods in chemical mechanical planarization (CMP). His work has implications for improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Shuo-Yen Tai holds a patent for a method titled "Method for integration optimization by chemical mechanical planarization end-pointing technique." This invention provides a new approach for determining the optimum film thickness of a film to be deposited over a semiconductor surface. The technique involves observing the electrical current and the resulting torque supplied to a rotating part of a polishing apparatus. From this data, the CMP end-point can be determined for a reference film that has been deposited. The invention addresses the observation of CMP end-point curves for films of various thicknesses and compares these curves to calculate deviations for multiple layers of that film thickness. The process is repeated for different film thicknesses, ultimately selecting the thickness that closely resembles an optimum deviation.
Career Highlights
Shuo-Yen Tai is currently employed at Promos Technologies, Inc., where he continues to develop and refine his innovative techniques in semiconductor processing. His work has been instrumental in advancing the capabilities of CMP technology, which is critical for the production of high-performance semiconductor devices.
Collaborations
Shuo-Yen Tai has collaborated with notable colleagues, including Ming-Cheng Yang and Jiun-Fang Wang. Their combined expertise has contributed to the successful development of innovative solutions in the semiconductor industry.
Conclusion
Shuo-Yen Tai's contributions to semiconductor technology through his patented methods demonstrate his commitment to innovation in the field. His work not only enhances manufacturing processes but also sets a foundation for future advancements in semiconductor technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile