Shuo-Huei Lin

Title: Shuo-Huei Lin and Semiconductor Process Fault Detection.

Introduction

Shuo-Huei Lin is an inventor based in Hsinchu, Taiwan. His work includes a patented system and method for identifying suspicious faults in semiconductor manufacturing processes using wafer acceptance test data. Lin is associated with Taiwan Semiconductor Manufacturing Company Limited.

Latest Patents

The provided information lists one patent for Lin: “Fuzzy Reasoning Model for Semiconductor Process Fault Detection Using Wafer Acceptance Test Data—System and Method for Detecting Suspicious Process Faults.”

The invention determines strength relationships between wafer acceptance test (WAT) parameters and manufacturing process steps. These relationships indicate how a failed process step may affect a WAT parameter. When a parameter falls outside its specified range, the system identifies process steps linked to that parameter as potential causes. The described approach also uses negative inferences to assess the degree of suspicion for individual steps and calculate an overall degree of suspiciousness.

Career Highlights

Lin’s listed patent addresses fault diagnosis in semiconductor production, where identifying likely causes of test failures can help focus investigation on relevant process steps. The supplied information records 1 patent for him.

Collaborations

The provided information names Ruenn-Sheng Peng and Kuo-Rung Hsiao as Lin’s coworkers. It does not specify their roles in the patent or the nature of their collaboration.

Conclusion

Shuo-Huei Lin’s listed invention applies fuzzy reasoning to wafer acceptance test data to identify and rank potentially faulty semiconductor process steps.