Location History:
- Fremont, CA (US) (2004 - 2008)
- San Antonio, TX (US) (2007 - 2009)
Company Filing History:
Years Active: 2004-2009
Title: Shuo Gu: Innovator in Semiconductor Technology
Introduction
Shuo Gu is a prominent inventor based in Fremont, CA, known for his contributions to semiconductor technology. With a total of 6 patents, he has made significant advancements in the field, particularly in the area of laser annealing and polysilicon films.
Latest Patents
One of his latest patents is titled "Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile." This invention discloses a method to laser anneal a silicon stack, including a heavily doped region buried beneath an undoped or lightly doped region. By selecting laser energy at a wavelength that is transmitted by crystalline silicon and absorbed by amorphous silicon, the crystallization process minimizes or prevents the diffusion of dopants upward from the doped region. The preferred embodiments involve pulsed laser energy and a thermally conductive structure that helps control the anneal and limit dopant diffusion.
Another notable patent is "Large-grain p-doped polysilicon films for use in thin film transistors." This method describes the formation of a large-grain, lightly p-doped polysilicon film suitable for use as a channel region in thin film transistors. The film is deposited lightly in situ doped with boron atoms using an LPCVD method at low temperatures, ensuring it remains amorphous. After deposition, the film undergoes crystallization through a low-temperature anneal or during an oxidation step, forming a gate oxide for thin film transistor devices.
Career Highlights
Shuo Gu has worked with several notable companies, including SanDisk 3D LLC and Matrix Semiconductor, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Throughout his career, Shuo has collaborated with talented individuals such as James Montague Cleeves and Sucheta Nallamothu. These collaborations have further enriched his work and contributions to the field.
Conclusion
Shuo Gu's innovative work in semiconductor technology, particularly in laser annealing and polysilicon films, showcases his significant impact on the industry. His patents reflect a deep understanding of materials and processes that are crucial for advancing semiconductor applications.