Shunsuke Kugo

Title: Shunsuke Kugo: Innovator in Semiconductor Technology

Introduction

Shunsuke Kugo is a prominent inventor based in Toyama, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative approaches have advanced the fabrication processes of semiconductor devices, showcasing his expertise and creativity.

Latest Patents

One of Kugo's latest patents is a method of fabricating a semiconductor device. This method involves implanting phosphorus ions into a polysilicon film in an nMOSFET region, followed by a heat treatment to diffuse phosphorus. This process reduces the concentration of phosphorus in the upper portion of the polysilicon film, which inhibits the enlargement of the gate electrode edges during patterning. Additionally, boron ions are implanted into the polysilicon film in a pMOSFET region, and the film is etched into a gate configuration. Notably, the method prevents the simultaneous diffusion of phosphorus and boron, thereby inhibiting boron entry from the gate electrode into the semiconductor substrate and suppressing side etching during n-type polysilicon gate formation.

Another significant patent by Kugo is a pattern formation method. In this method, an organic bottom anti-reflective coating is deposited on an underlying film, followed by the formation of a resist pattern. Dry etching is then performed on the organic bottom anti-reflective coating, masked with the resist pattern, to create an anti-reflective coating pattern. The etching process utilizes gas containing sulfur components, such as SO₂/O₂-based or COS/O₂-based etching gas, enhancing the efficiency of the pattern formation.

Career Highlights

Throughout his career, Shunsuke Kugo has worked with notable companies, including Matsushita Electric Industrial Co., Ltd. and Matsushita Electronics Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Kugo has collaborated with esteemed colleagues, including Hideo Nikoh and Tomoyuki Sasaki. These partnerships have fostered a creative environment that has led to innovative solutions in the semiconductor field.

Conclusion

Shunsuke Kugo's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence the development of advanced semiconductor devices