Location History:
- Kudamatsu, JP (2015 - 2016)
- Tokyo, JP (2018)
Company Filing History:
Years Active: 2015-2018
Title: Shunsuke Kanazawa: Innovator in Plasma Processing Technology
Introduction
Shunsuke Kanazawa is a notable inventor based in Kudamatsu, Japan. He has made significant contributions to the field of plasma processing, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of plasma processing methods and apparatus.
Latest Patents
One of Kanazawa's latest patents is a plasma processing method that performs processing on a sample through multiple steps. This method includes a first step where the supply of gas is halted while an inert gas is supplied. The second step involves stopping the supply of the inert gas while introducing a gas from another step. The method detects the amount of gas remaining in the process chamber during the first step and the amount of gas introduced in the second step. The transition between the two steps is based on these detected amounts.
Another significant patent is a plasma processing apparatus that features a processing chamber for plasma processing samples. This apparatus includes a first high-frequency power supply for plasma generation and a second high-frequency power supply for the sample stage. A pulse generation device modulates the high-frequency power, ensuring that the frequency of the first pulses is higher than that of the second pulses. This innovative design enhances the precision of plasma processing.
Career Highlights
Shunsuke Kanazawa is currently employed at Hitachi High-Technologies Corporation, where he continues to develop advanced plasma processing technologies. His work has been instrumental in improving the capabilities of plasma processing equipment, making it more efficient for various applications.
Collaborations
Kanazawa collaborates with talented individuals in his field, including Naoki Yasui and Michikazu Morimoto. Their combined expertise contributes to the innovative advancements in plasma processing technology.
Conclusion
Shunsuke Kanazawa is a prominent inventor whose work in plasma processing technology has led to significant advancements in the field. His patents reflect a commitment to innovation and efficiency, making him a valuable asset to Hitachi High-Technologies Corporation and the broader scientific community.