Tokyo, Japan

Shunichi Uzawa


Average Co-Inventor Count = 4.1

ph-index = 19

Forward Citations = 944(Granted Patents)


Inventors with similar research interests:


Location History:

  • Naka, JP (1981 - 1989)
  • Nakamachi, JP (1992 - 2000)
  • Setagaya-ku, JP (2003)
  • Tokyo, JP (1983 - 2005)

Company Filing History:


Years Active: 1981-2005

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Areas of Expertise:
X-Ray Exposure Apparatus
Semiconductor Manufacturing
Microstructure
Synchrotron Radiation
Mask Structure
Alignment System
Substrate Conveying Device
Temperature Controlling Device
X-Ray Lithography
Vacuum-Holding Apparatus
Light Quantity Control
Workpiece Supporting Mechanism
63 patents (USPTO):Explore Patents

Title: Innovations in X-ray Technology by Shunichi Uzawa

Introduction

Shunichi Uzawa is an esteemed inventor based in Tokyo, Japan, known for his significant contributions to X-ray technology and semiconductor devices. With an impressive portfolio of 63 patents, his work has had a profound impact on the fields of medical imaging and materials science.

Latest Patents

Among Uzawa's latest patents are an X-ray exposure apparatus, an X-ray exposure method, an X-ray mask, and an X-ray mirror. He also developed synchrotron radiation apparatus and methods, specifically designed for semiconductor devices. Notably, one of his inventions describes an X-ray exposure apparatus that includes an X-ray mirror composed of materials with an absorption edge in wavelength regions of less than 0.45 nm or exceeding 0.7 nm. This advanced technology allows for the extraction of exposure X-rays from synchrotron radiation sources, enhancing semiconductor manufacturing processes, particularly in implementing X-ray exposure in critical wavelength ranges. The materials used for the X-ray mirror include iron, cobalt, nickel, copper, manganese, chromium, and their respective alloys, nitrides, carbides, and borides.

Career Highlights

Shunichi Uzawa has had a distinguished career, having worked for prominent companies such as Canon and Mitsubishi Electric Corporation. His tenure at these institutions provided him with a platform to develop and refine his innovative ideas in the realm of precision imaging and semiconductor technologies.

Collaborations

Throughout his career, Uzawa has collaborated with notable colleagues, including Takao Kariya and Nobutoshi Mizusawa. These partnerships have facilitated the exchange of ideas and further advanced research in X-ray technology and semiconductor devices.

Conclusion

Shunichi Uzawa's innovative contributions to the field of X-ray technology and semiconductor manufacturing underscore his role as a leading inventor in Japan. With a strong patent portfolio and collaborative efforts, Uzawa continues to push the boundaries of technology, paving the way for future advancements in imaging and materials science.

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