Shuhei Matsumoto

Title: Innovations by Shuhei Matsumoto

Introduction

Shuhei Matsumoto is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of bonding apparatus and systems, holding a total of 5 patents. His work focuses on advanced technologies that enhance the efficiency and precision of substrate bonding processes.

Latest Patents

Matsumoto's latest patents include a range of innovative bonding apparatuses and methods. One of his notable inventions is a bonding apparatus designed to bond substrates, which features a first holder that vacuum-exhausts a first substrate to attract and hold it on its bottom surface. Additionally, a second holder is positioned under the first holder, also vacuum-exhausting a second substrate to hold it on its top surface. The apparatus includes a rotator for relative rotation of the holders, a moving device for horizontal movement, and three position measurement devices to ensure precise control. Another patent describes a similar bonding apparatus that utilizes a mover and a laser interferometer system for accurate position measurement, further enhancing the bonding process.

Career Highlights

Shuhei Matsumoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to develop and refine his innovative bonding technologies, contributing to advancements in the field.

Collaborations

Matsumoto collaborates with talented coworkers, including Takashi Nakamitsu and Toshifumi Inamasu. Their combined expertise fosters a creative environment that drives innovation and enhances the development of new technologies.

Conclusion

Shuhei Matsumoto's contributions to bonding technologies exemplify the spirit of innovation in the field. His patents reflect a commitment to improving manufacturing processes and advancing technology.