Location History:
- Hsinchu, TW (2023)
- Taipei, TW (2014 - 2024)
- Hsin-Chu, TW (2024)
Company Filing History:
8 out of 40,635 
3 out of 647 
3 out of 1,585 
Years Active: 2014-2025
Title: Innovations of Shu-Yen Wang in Wafer Cleaning Technologies
Introduction
Shu-Yen Wang is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in wafer cleaning technologies. With a total of 11 patents to his name, his work has advanced the efficiency and effectiveness of cleaning processes in the semiconductor industry.
Latest Patents
One of his latest patents is a wafer wet cleaning system. This innovative process involves sampling and analyzing a drained cleaning solution to determine the concentration of metal ions. The method includes dispensing a chemical solution on one or more wafers, collecting the solution, and adjusting cleaning parameters based on contaminant concentration. If the concentration is equal to or less than a baseline value, the wafers are transferred out of the cleaning station.
Another notable patent is related to systems and methods for in-situ Marangoni cleaning. This method involves immersing a wafer in a bath within a cleaning chamber and removing it through a solvent into a gas. The process includes determining a parameter value from the gas and performing remediation if the value exceeds a threshold.
Career Highlights
Shu-Yen Wang has worked with leading companies in the semiconductor industry, including Taiwan Semiconductor Manufacturing Company and Inventec Technology Corporation. His experience in these organizations has allowed him to develop and refine his innovative cleaning technologies.
Collaborations
Throughout his career, Shu-Yen has collaborated with notable colleagues such as Wei-Chun Hsu and Sheng-Wei Wu. These partnerships have contributed to the advancement of his research and the successful implementation of his patented technologies.
Conclusion
Shu-Yen Wang's contributions to wafer cleaning technologies have significantly impacted the semiconductor industry. His innovative patents and collaborations reflect his dedication to improving manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.