Company Filing History:
Years Active: 2012-2025
Title: Innovations of Shu Yamamoto
Introduction
Shu Yamamoto is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, his work focuses on improving the efficiency and effectiveness of substrate processing methods.
Latest Patents
Yamamoto's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus is designed for drying a substrate by substituting a liquid film of a drying liquid with a supercritical fluid. This apparatus features a pressure container that accommodates the substrate, a discharge line for fluid discharge, a depressurizing valve, and a concentration measurement part that measures the concentration of vapor of the drying liquid in the fluid flowing through the discharge line.
Another significant patent is the substrate liquid processing apparatus and liquid discharge evaluation method. This invention involves a controller that manages liquid supply to alter the landing position of a liquid on a substrate's surface. The controller derives discharge position deviation information by comparing temperature data collected during the movement of a liquid discharge nozzle along different paths.
Career Highlights
Shu Yamamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to develop innovative solutions that enhance substrate processing techniques.
Collaborations
Yamamoto collaborates with talented coworkers, including Terufumi Wakiyama and Yuichi Douki. Their combined expertise contributes to the advancement of technology in their field.
Conclusion
Shu Yamamoto's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative approaches continue to shape the industry and improve processing methods.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.