Kumamoto, Japan

Shu Yamamoto


Average Co-Inventor Count = 2.1

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2012-2025

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3 patents (USPTO):Explore Patents

Title: Innovations of Shu Yamamoto

Introduction

Shu Yamamoto is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, his work focuses on improving the efficiency and effectiveness of substrate processing methods.

Latest Patents

Yamamoto's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus is designed for drying a substrate by substituting a liquid film of a drying liquid with a supercritical fluid. This apparatus features a pressure container that accommodates the substrate, a discharge line for fluid discharge, a depressurizing valve, and a concentration measurement part that measures the concentration of vapor of the drying liquid in the fluid flowing through the discharge line.

Another significant patent is the substrate liquid processing apparatus and liquid discharge evaluation method. This invention involves a controller that manages liquid supply to alter the landing position of a liquid on a substrate's surface. The controller derives discharge position deviation information by comparing temperature data collected during the movement of a liquid discharge nozzle along different paths.

Career Highlights

Shu Yamamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to develop innovative solutions that enhance substrate processing techniques.

Collaborations

Yamamoto collaborates with talented coworkers, including Terufumi Wakiyama and Yuichi Douki. Their combined expertise contributes to the advancement of technology in their field.

Conclusion

Shu Yamamoto's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative approaches continue to shape the industry and improve processing methods.

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