The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Sep. 22, 2008
Shu Yamamoto, Koshi, JP;
Shu Yamamoto, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A process-liquid supply part includes: a supply tank configured to contain a process liquid; a level gauge pipe connected to the supply tank, the level gauge pipe being provided with level sensors for detecting a remaining amount of the process liquid contained in the supply tank; and a measuring part configured to measure a remaining amount of the process liquid based on signals from the level sensors provided on the level gauge pipe. Connected to the supply tank are a process-liquid supply pipe configured to drain the process liquid contained in the supply tank, and a process-liquid return pipe configured to introduce the process liquid drained through the process-liquid supply pipe to the supply tank. A connection pipe, in which an openable and closable valve is provided, disposed between the process-liquid supply pipe or the process-liquid return pipe and the level gauge pipe.