Company Filing History:
Years Active: 2023-2025
Title: **Innovator Spotlight: Shu-Lan Chang**
Introduction
Shu-Lan Chang, an accomplished inventor based in Hsinchu, Taiwan, has made significant contributions to the field of semiconductor technology. With a total of two patents to his name, his innovative work has garnered attention within the industry, particularly for its focus on hybrid conductive structures.
Latest Patents
Among Shu-Lan Chang's latest patents is a groundbreaking method for the fabrication of ruthenium conductive structures over cobalt conductive structures. This patent outlines a detailed process that involves several critical steps. It begins with the formation of a first opening in a dielectric layer to expose a first cobalt contact, which is subsequently filled with ruthenium metal to create a ruthenium contact. The method further involves the formation of a second opening in the dielectric layer to expose a second cobalt contact and a gate structure, followed by the filling of this opening with tungsten to establish a tungsten contact. Finally, a copper conductive structure is formed on both the ruthenium and tungsten contacts, ensuring effective contact between the copper and the ruthenium metal.
Career Highlights
Shu-Lan Chang is currently associated with Taiwan Semiconductor Manufacturing Company Limited (TSMC), a leading entity in semiconductor manufacturing. His work at TSMC reflects a commitment to advancing technology and enhancing the efficiency of electronic components.
Collaborations
Collaboration has been a key aspect of Shu-Lan Chang’s career. He has worked alongside talented coworkers, including Cheng-Wei Chang and Chien-Shun Liao, to push the boundaries of innovation in semiconductor technologies. These partnerships help foster a creative environment that leads to groundbreaking advancements.
Conclusion
Shu-Lan Chang's contributions to the field of semiconductor technology through his innovative patents and work at TSMC highlight his role as a significant inventor in the industry. His collaboration with skilled peers and his commitment to advancing conductive structures position him as a noteworthy figure in the realm of technological innovation.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.