Taiwan Semiconductor Manufacturing Comp. Ltd.

Shu-Lan Chang

Sung-Li Wang

Shuen-Shin Liang

Chia-Hung Chu

Cheng-Wei Chang

Hsu-Kai Chang

Yi-Ying Liu

Chien-Shun Liao

Ming-Hsing Tsai

Chun-Hsien Huang

Wei-Jung Lin

Chih-wei Chang

Ching-Yi Chen

Ya-Yi Cheng

Yi-Hsiang Chao

Kevin Lee

Peng-Hao Hsu

Pei Shan Chang

A method includes forming a dielectric layer over a source/drain region. An opening is formed in the dielectric layer. The opening exposes a portion of the source/drain region. A conductive liner is formed on sidewalls and a bottom of the opening. A surface modification process is performed on an exposed surface of the conductive liner. The surface modification process forms a surface coating layer over the conductive liner. The surface coating layer is removed to expose the conductive liner. The conductive liner is removed from the sidewalls of the opening. The opening is filled with a conductive material in a bottom-up manner. The conductive material is in physical contact with a remaining portion of the conductive liner and the dielectric layer.

Contact features of semiconductor device and method of forming same

The present disclosure describes a method for the fabrication of ruthenium conductive structures over cobalt conductive structures. In some embodiments, the method includes forming a first opening in a dielectric layer to expose a first cobalt contact and filling the first opening with ruthenium metal to form a ruthenium contact on the first cobalt contact. The method also includes forming a second opening in the dielectric layer to expose a second cobalt contact and a gate structure and filling the second opening with tungsten to form a tungsten contact on the second cobalt contact and the gate structure. Further, the method includes forming a copper conductive structure on the ruthenium contact and the tungsten contact, where the copper from the copper conductive structure is in contact with the ruthenium metal from the ruthenium contact.

Hybrid conductive structures

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Hsinchu, Taiwan

Shu-Lan Chang