This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2021-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2021-2025
Title: Shu Kino: Innovator in Substrate Processing Technology
Introduction
Shu Kino is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of substrate processing.
Latest Patents
Kino's latest patents include a substrate processing method and a substrate processing apparatus. The substrate processing method is designed for processing a substrate that consists of a first region and a second region with differing compositions. This method involves preferentially forming a first deposit on the first region, followed by the formation of a second deposit on the second region, which contains fluorine. The process is iterative, continuing until a specified stop condition is met.
The substrate processing apparatus features a chamber, a substrate support, a plasma generator, and a controller. This apparatus is capable of cooling the substrate to temperatures below −30° C. and etching films through specific apertures using plasma generated from a fluorocarbon gas. This innovative design allows for the creation of tapered apertures in the substrate films, enhancing the precision of the etching process.
Career Highlights
Shu Kino is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to develop and refine his innovative substrate processing techniques, contributing to advancements in the field.
Collaborations
Kino collaborates with notable colleagues such as Yasutaka Hama and Shinya Morikita. Their combined expertise fosters a creative environment that drives innovation in substrate processing technologies.
Conclusion
Shu Kino's contributions to substrate processing technology exemplify the impact of innovative thinking in the field. His patents and work at Tokyo Electron Limited highlight his commitment to advancing the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile