Company Filing History:
Years Active: 2014-2018
Title: Innovations of Shu-Fen Wu in Semiconductor Technology
Introduction
Shu-Fen Wu is a notable inventor based in Yilan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on advanced methods and apparatuses for semiconductor film formation and curing processes.
Latest Patents
One of his latest patents is a "Semiconductor film formation apparatus and process." This invention discloses an apparatus and method for forming thin films on a semiconductor substrate. The apparatus includes a process chamber designed to support the substrate, a gas excitation power source, and first and second gas distribution showerheads connected to a reactive process gas supply containing film precursors. These showerheads dispense gas into two distinct zones above the substrate, generating an inner plasma field and an outer plasma field over the wafer. This innovative approach promotes the formation of a film with a substantially uniform thickness across the substrate.
Another significant patent is the "UV curing system for semiconductors." This system is designed for treating semiconductor substrates, such as wafers. It includes a processing chamber, a wafer support for holding the wafer, a UV radiation source positioned above the chamber, and a UV transparent window between the radiation source and wafer support. The system enhances wafer curing uniformity by normalizing UV intensity levels on the wafer, ensuring effective treatment.
Career Highlights
Shu-Fen Wu is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., where he continues to innovate in semiconductor technologies. His work has been instrumental in advancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable colleagues, including You-Hua Chou and Chih-Tsung Lee, contributing to a dynamic research environment that fosters innovation.
Conclusion
Shu-Fen Wu's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence the development of advanced semiconductor manufacturing techniques.