Shu-Fang Chen

Title: Innovations of Shu-Fang Chen in Semiconductor Technology

Introduction

Shu-Fang Chen is a prominent inventor based in Hsinchu County, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on advanced methods for forming semiconductor devices, which are crucial for modern electronics.

Latest Patents

One of Shu-Fang Chen's latest patents is titled "Shallow trench isolation (STI) contact structures and methods of forming same." This patent describes a method of forming a semiconductor device that includes several key steps. It involves forming a first semiconductor strip and a second semiconductor strip above different regions of a substrate. An isolation region is created between these strips, followed by the formation of a gate stack over the sidewalls of the strips. The process includes etching a trench that extends into the gate stack and isolation regions, exposing the substrate regions. A dielectric layer is then formed on the trench's sidewalls and bottom surface, followed by filling a conductive material to create a contact that extends below the isolation region's bottommost surface.

Career Highlights

Shu-Fang Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approaches have contributed to the advancement of semiconductor technologies, making him a valuable asset to his company.

Collaborations

Shu-Fang Chen has collaborated with notable coworkers, including Hung-Chung Chien and Hung-Chang Hsieh. These collaborations have fostered a productive environment for innovation and development in semiconductor technologies.

Conclusion

Shu-Fang Chen's contributions to semiconductor technology through his patents and collaborations highlight his role as a key inventor in the field. His innovative methods continue to influence the development of advanced semiconductor devices.