Location History:
- Kumamoto, JP (2016)
- Koshi, JP (2020)
Company Filing History:
Years Active: 2016-2020
Title: Innovations by Shozou Maeda
Introduction
Shozou Maeda is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of liquid processing technology, holding two patents that showcase his innovative approach to substrate processing.
Latest Patents
Maeda's latest patents include a liquid processing method and a substrate processing apparatus. The liquid processing method is designed to efficiently remove pure water from a substrate pattern and replace it with a solvent rapidly. This method involves supplying pure water onto a horizontally held substrate, followed by the application of a heated solvent to facilitate the drying process. The substrate processing apparatus features a complex system that includes a first line for pressurized processing liquid, multiple second lines, and a liquid processing unit that effectively manages the flow and pressure of the processing liquid.
Career Highlights
Shozou Maeda has established himself as a key figure in his field through his work at Tokyo Electron Limited. His innovative methods and apparatuses have the potential to enhance the efficiency of substrate processing in various applications.
Collaborations
Maeda has collaborated with notable coworkers such as Mitsunori Nakamori and Yosuke Kawabuchi, contributing to advancements in liquid processing technologies.
Conclusion
Shozou Maeda's contributions to liquid processing technology through his patents reflect his innovative spirit and dedication to advancing the field. His work continues to influence substrate processing methods, showcasing the importance of innovation in technology.