Company Filing History:
Years Active: 2025
Title: Shoki Mizuguchi: Innovator in Substrate Processing Technology
Introduction
Shoki Mizuguchi is a prominent inventor based in Kumamoto, Japan. He is known for his contributions to substrate processing technology, particularly in the semiconductor industry. His innovative approach has led to the development of advanced apparatuses that enhance the efficiency of substrate processing.
Latest Patents
Mizuguchi holds a patent for a substrate processing apparatus and method. This apparatus includes a substrate holding unit, a fluid supplying unit, a processing-liquid supplying unit, a nozzle, a fluid amount adjusting unit, and a controller. The substrate holding unit is designed to hold a substrate in a rotatable manner. The fluid supplying unit is responsible for supplying fluid that includes pressurized vapor or mist of deionized water. The processing-liquid supplying unit provides a processing liquid that contains at least sulfuric acid. The nozzle connects both the fluid supplying unit and the processing-liquid supplying unit to discharge a mixed fluid toward the substrate. The fluid amount adjusting unit plays a crucial role in adjusting the flow volume of the fluid, while the controller manages the ratio of the fluid to the processing liquid.
Career Highlights
Shoki Mizuguchi is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment sector. His work has significantly impacted the efficiency and effectiveness of substrate processing methods, making him a valuable asset to his organization.
Collaborations
Mizuguchi has collaborated with notable colleagues such as Hiroki Sakurai and Yenrui Hsu. These collaborations have fostered innovation and have contributed to advancements in substrate processing technologies.
Conclusion
Shoki Mizuguchi's contributions to substrate processing technology exemplify his innovative spirit and dedication to advancing the semiconductor industry. His patent and collaborative efforts continue to influence the field positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.