Shoichiro Kumamoto

Title: Innovations by Shoichiro Kumamoto

Introduction

Shoichiro Kumamoto is a notable inventor based in Shizuoka, Japan. He has made significant contributions to the field of semiconductor manufacturing through his innovative methods. With a total of 2 patents, his work focuses on the formation of cobalt and copper films, which are essential in the production of electronic devices.

Latest Patents

Kumamoto's latest patents include a method for the formation of Co film and a method for the formation of Cu interconnection film. The Co film is created by supplying cobalt alkylamidinate along with a reducing gas on the surface of a base material, which can be an SiO film or a barrier film. This process is crucial for establishing a foundation for the subsequent Cu interconnection film. The second patent details a method for forming a Cu electrical interconnection film, which involves using an adhesive layer to enhance the bond between the Cu film and the underlying materials during semiconductor device manufacturing.

Career Highlights

Kumamoto is currently employed at Ulvac, Inc., where he continues to develop innovative solutions for the semiconductor industry. His expertise in film formation techniques has positioned him as a key player in advancing manufacturing processes.

Collaborations

Throughout his career, Kumamoto has collaborated with esteemed colleagues such as Harunori Ushikawa and Satoru Toyoda. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Shoichiro Kumamoto's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative methods for film formation are paving the way for advancements in electronic device manufacturing.