Shogo Inaba

Title: Shogo Inaba: Semiconductor Substrate Processing Inventor

Introduction

Shogo Inaba is an inventor based in Koshi, Japan, whose patent work focuses on processing semiconductor substrates. He is associated with Tokyo Electron Limited and is credited with five patents.

Latest Patents

Inaba’s listed recent patents address methods and equipment for forming coating films on the peripheral edges of substrates.

“Substrate Processing Method and Storage Medium” describes a process that uses a rotating substrate holder and chemical-liquid suppliers to apply materials to the substrate’s edge and surfaces. The apparatus partially removes one chemical liquid, applies another to form a coating film, and removes remaining liquid under controller supervision.

“Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium” describes a related system for coating a substrate’s peripheral edge, including portions of its front, side, and rear surfaces. Its components coordinate chemical-liquid application and removal to support the coating process.

Career Highlights

Inaba’s patent portfolio reflects work on substrate-processing technologies, particularly the controlled application and removal of chemical liquids during edge coating. His listed affiliation is Tokyo Electron Limited, a company active in semiconductor manufacturing equipment.

Collaborations

Masatoshi Kawakita and Yusaku Hashimoto are identified as Inaba’s coworkers. The supplied information does not specify their roles in the listed patents.

Conclusion

Shogo Inaba’s five-patent record highlights his contributions to semiconductor substrate processing, especially equipment and methods for forming coatings on substrate edges.