This inventor holds 1 USPTO granted patent. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Sho Sato: Inventor in Plasma Processing Technology.
Introduction
Sho Sato is an inventor associated with Miyagi, Japan, and Tokyo Electron Limited. His patent work concerns plasma-processing equipment and methods for matching electrical impedance.
Latest Patents
The provided information lists one patent for Sato: “Plasma Processing Apparatus and Matching Method.” The invention describes a chamber for plasma processing, an electrode that supplies radio-frequency power, a power supply, and a matching device connected between the supply and electrode. The power supply can provide either a modulated or continuous radio-frequency wave. During a continuous-wave period before or after switching between these waveforms, the matching device gradually changes the load impedance toward a target impedance. This approach addresses impedance matching during changes in the supplied power.
Career Highlights
Sato is associated with Tokyo Electron Limited, a company that develops semiconductor manufacturing equipment. His listed patent focuses on plasma-processing apparatus and the control of impedance as radio-frequency power changes. The provided data attributes 1 patent to him.
Collaborations
Ken Yoshida is identified as Sato’s coworker. The provided information does not specify whether Yoshida collaborated on the patent.
Conclusion
Sho Sato’s listed invention addresses radio-frequency power and impedance matching in plasma-processing equipment, reflecting his connection to semiconductor manufacturing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile