This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Innovations of Sho Kano
Introduction
Sho Kano is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding 2 patents that showcase his innovative approaches.
Latest Patents
Kano's latest patents include a substrate transfer method and a substrate processing apparatus. The substrate transfer method is performed in a substrate processing apparatus that includes a transfer mechanism group designed to transfer a substrate into a carrier via a module group and an exposure apparatus. This method involves a first transfer mechanism that transfers the substrate in a specific order through various modules, including a pre-stage module, the exposure apparatus, and a first post-stage module. Additionally, a second transfer mechanism is utilized to transfer the substrate through a different sequence of modules, including a heating module and a developing module. The method also includes acquiring a section transfer time for the substrate and performing carry-in or carry-out operations based on the maximum section transfer time.
Career Highlights
Sho Kano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work focuses on enhancing substrate processing techniques, which are crucial for the production of advanced electronic devices.
Collaborations
Kano has collaborated with notable colleagues, including Kenichirou Matsuyama and Shingo Katsuki. Their teamwork has contributed to the development of innovative solutions in substrate processing.
Conclusion
Sho Kano's contributions to substrate processing through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in semiconductor technology.