Shinsuke Inoue

Title: Innovations by Shinsuke Inoue

Introduction

Shinsuke Inoue is a notable inventor based in Koka, Japan. He has made significant contributions to the field of ion implantation technology, holding two patents that showcase his innovative approach to wafer processing.

Latest Patents

One of his latest patents is an ion implantation apparatus. This apparatus includes a transfer device that transfers a wafer, a support device that supports the wafer at an implantation position, and a control device that manages the ion implantation process. The control device performs chain implantation processing on the wafer and adjusts the transfer or support device based on the warpage information of the wafer. Another significant patent is for a wafer separating apparatus and method. This apparatus features an electrostatic chuck that supports a wafer during processing using a specific voltage. The separation structure mechanically separates the wafer from the electrostatic chuck, while the control device reduces the voltage after processing is completed, allowing for effective separation.

Career Highlights

Shinsuke Inoue works at Nissin Ion Equipment Co., Ltd., where he continues to develop advanced technologies in the field of ion implantation. His work has been instrumental in enhancing the efficiency and effectiveness of wafer processing techniques.

Collaborations

He collaborates with talented coworkers such as Jian Wang and Yuta Iwanami, contributing to a dynamic and innovative work environment.

Conclusion

Shinsuke Inoue's contributions to ion implantation technology through his patents reflect his expertise and commitment to innovation. His work continues to influence the field and drive advancements in wafer processing.