Tsukuba, Japan

Shinji Togawa


Average Co-Inventor Count = 6.0

ph-index = 2

Forward Citations = 7(Granted Patents)


Company Filing History:


Years Active: 1997-1998

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3 patents (USPTO):Explore Patents

Title: The Innovations of Shinji Togawa

Introduction

Shinji Togawa is a notable inventor based in Tsukuba, Japan. He has made significant contributions to the field of silicon crystal growth, holding a total of 3 patents. His work focuses on enhancing the quality and uniformity of silicon crystals, which are essential in various technological applications.

Latest Patents

One of his latest patents involves the growth of silicon crystals from a melt that exhibits extraordinary eddy flows. In this innovation, when a silicon single crystal is pulled from the melt, the state of the eddy flows is assessed based on the temperature distribution at the surface of the melt. By adding gases such as nitrogen, xenon, or krypton to the atmospheric gas, Togawa aims to maintain the eddy flows in an unstabilized condition. This method is particularly effective when a dopant is introduced to suppress density deviations, resulting in a single crystal with highly stabilized quality.

Another significant patent by Togawa addresses the growth of silicon single crystals with uniform impurity distribution. By employing the Czochralski method, he pulls a boron or phosphorus-doped silicon single crystal from a corresponding melt. The addition of elements like gallium, antimony, or indium helps stabilize the temperature conditions during crystal growth, ensuring uniform impurity distribution along both the lengthwise and radial directions of the crystal.

Career Highlights

Shinji Togawa has worked with prominent organizations, including the Research Development Corporation of Japan and Sumitomo Sitix Corporation. His experience in these companies has allowed him to refine his expertise in silicon crystal growth and contribute to advancements in the field.

Collaborations

Throughout his career, Togawa has collaborated with notable colleagues such as Koji Izunome and Souroku Kawanishi. These partnerships have further enriched his research and innovations in silicon crystal technology.

Conclusion

Shinji Togawa's contributions to the field of silicon crystal growth are noteworthy, with his innovative patents enhancing the quality and uniformity of silicon crystals. His work continues to influence advancements in technology and materials science.

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