Shinichi Tomizawa

Title: Innovations of Shinichi Tomizawa

Introduction

Shinichi Tomizawa is a notable inventor based in Annaka, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on methods for fabricating bonded wafers, which are essential in the production of advanced electronic devices.

Latest Patents

One of his latest patents is a "Method of Fabricating Bonded Wafer." This invention relates to a technique for bonding a bond wafer and a base wafer, both composed of silicon single crystal, while placing an oxide film in between. The bond wafer is then thinned, and the use of modified chemically-etched wafers as both the bond wafer and base wafer successfully reduces the unbonded area after annealing for bonding. The modified chemically-etched wafer refers to a wafer that has undergone alkali etching followed by acid etching, with a larger etching amount in the alkali etching phase.

Another significant patent is the "Method for Producing Bonding Wafer." This method utilizes the ion implantation delamination technique, which includes bonding a bond wafer with a micro bubble layer formed by gaseous ion implantation to a base wafer serving as a support substrate. The bond wafer is then delaminated at the micro bubble layer to form a thin film on the base wafer. Following delamination, the bonded wafer undergoes heat treatment in an inert gas atmosphere, followed by thermal oxidation to form a thermal oxide film on the thin film's surface, which is subsequently removed to reduce the thin film's thickness.

Career Highlights

Shinichi Tomizawa is associated with Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor industry. His innovative approaches and patents have contributed to advancements in wafer fabrication techniques, enhancing the efficiency and performance of semiconductor devices.

Collaborations

Throughout his career, Tomizawa has collaborated with esteemed colleagues such as Kiyoshi Mitani and Masatake Nakano. Their combined expertise has fostered a productive environment for innovation and development in semiconductor technologies.

Conclusion

Shinichi Tomizawa's contributions to the field of semiconductor technology through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in the industry, paving the way for future innovations.