Shingo Terakado

Title: Shingo Terakado: Innovator in Photochemical Processes

Introduction

Shingo Terakado is a prominent inventor based in Tsukuba, Japan. He has made significant contributions to the field of photochemical processes, holding a total of 4 patents. His innovative work focuses on enhancing the efficiency and accuracy of semiconductor manufacturing processes.

Latest Patents

One of Terakado's latest patents is a stencil mask designed for use in photochemical reaction processes. This stencil mask features a path that extends between its rear and front surfaces, allowing for the passage of photons to supply a reactive medium while discharging an exhaust medium containing reaction products. The path also serves to separate an object from a pattern on a mask substrate, with a depth smaller than the minimum value attained by semiconductor manufacturing processes.

Another notable patent is a dry etching method capable of performing fine patterning. In this method, a sample substrate is fixedly disposed on a table within a reactant chamber. Gas plasma is introduced into the chamber, and excitation light is irradiated onto the substrate from above. A mask is placed in the optical path of the excitation light, allowing the substrate to be irradiated according to a designated pattern. This method enhances the etching rate by exciting electrons in the substrate, leading to high-accuracy pattern transfers.

Career Highlights

Shingo Terakado is currently employed at Sanyo Electric Co., Ltd., where he continues to develop innovative technologies. His work has significantly impacted the semiconductor industry, particularly in the areas of photochemical processes and dry etching methods.

Collaborations

Terakado collaborates with talented coworkers, including Hiromi Mukaida and Ryohkan Yuasa. Their combined expertise contributes to the advancement of technologies in their field.

Conclusion

Shingo Terakado is a key figure in the realm of photochemical processes, with a focus on enhancing semiconductor manufacturing techniques. His innovative patents and contributions to Sanyo Electric Co., Ltd. highlight his importance in the industry.