Company Filing History:
Years Active: 2006-2009
Title: Shing-Chii Lu: Innovator in Semiconductor Fabrication
Introduction
Shing-Chii Lu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative methods have advanced the fabrication processes of semiconductor devices, enhancing their performance and efficiency.
Latest Patents
One of his latest patents is a method for fabricating a semiconductor device. This method includes several steps, such as providing a semiconductor device formed with multiple transistors and forming a first stress layer on the device. Additionally, a second stress layer is formed on another surface of the semiconductor device. The process involves covering a region of the first stress layer with photo resist and performing ion implantation on the uncovered parts. This method aims to enhance the performance of both PMOS and NMOS transistors on the same wafer while addressing integration challenges caused by compressive and tensile stress.
Another notable patent by Shing-Chii Lu is a method of making semiconductor devices. This method employs a high stress layer as a cap layer on or around the transistors. A specific region is defined through a photo resistor mask, and the stress in that region is altered by ion implantation. This approach results in both compressive and tensile stress occurring on the high stress layer, which simultaneously improves the characteristics of the transistors and enhances carrier mobility.
Career Highlights
Shing-Chii Lu is affiliated with the Industrial Technology Research Institute, where he continues to innovate in semiconductor technology. His work has been instrumental in developing methods that improve the performance and reliability of semiconductor devices.
Collaborations
He has collaborated with notable colleagues, including Cha-Hsin Lin and Zing-Way Pei, contributing to advancements in their shared field of expertise.
Conclusion
Shing-Chii Lu's contributions to semiconductor fabrication are noteworthy, as his innovative methods have the potential to significantly enhance device performance. His work continues to influence the semiconductor industry positively.