Oarai, Japan

Shin Tamata



Average Co-Inventor Count = 4.6

ph-index = 10

Forward Citations = 251(Granted Patents)


Location History:

  • Hitachi, JP (1986 - 1990)
  • Higashiibaraki-gun, Ibaraki-ken, JP (1992)
  • Higashiibaraki, JP (1992 - 1996)
  • Ibaraki-ken, JP (2005)
  • Ooarai, JP (1995 - 2007)
  • Oarai-machi, JP (2007)
  • Higashiibaraki-gun, JP (2005 - 2008)
  • Oarai, JP (2006 - 2010)
  • Ooarai-machi, JP (1998 - 2012)

Company Filing History:


Years Active: 1986-2012

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38 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Shin Tamata in Perfluoride Processing

Introduction

Shin Tamata, an accomplished inventor based in Oarai, Japan, boasts an impressive portfolio of 38 patents. His work significantly advances the field of perfluoride processing, particularly in the semiconductor and liquid crystal manufacturing industries. His latest inventions demonstrate a commitment to improving the efficiency and environmental impact of these processes.

Latest Patents

Among Shin Tamata's latest patents is a method for processing perfluorocarbon (PFC) and an associated apparatus. This innovative process begins with conducting exhaust gas containing perfluoride compounds and silicon into a silicon remover. The interaction with water and air enhances the decomposition of PFC to hydrofluoric acid (HF) and carbon dioxide (CO2). This efficient method allows for effective utilization of the catalyst by removing silicon components before the exhaust gas reaches the catalyst layer, thereby improving reaction performance.

Another noteworthy patent is his perfluoride processing apparatus. This invention incorporates multiple etchers within a clean room, connected to a PFC decomposition device located outside the clean environment. This novel design allows for a reduction in the physical space required within the clean room for semiconductor fabrication or liquid crystal manufacturing, effectively downsizing the infrastructure without compromising functionality.

Career Highlights

Shin Tamata's professional journey includes significant tenures at prestigious companies such as Hitachi, Ltd. and Hitachi Kyowa Engineering Co., Ltd. His expertise and innovations have not only contributed to these organizations but have also set new standards in the realm of semiconductor and liquid crystal technologies.

Collaborations

Throughout his career, Shin has collaborated with esteemed colleagues like Shuichi Kanno and Makoto Kikuchi. These partnerships have fostered a collaborative approach to innovation, allowing for a cross-pollination of ideas that have propelled advancements in their respective fields.

Conclusion

Shin Tamata’s work exemplifies a dedication to innovation in the processing of perfluorinated compounds. By developing efficient methods and apparatuses, he has significantly improved processes within the semiconductor and liquid crystal sectors. His contributions continue to influence industry practices, highlighting the vital role of inventors in driving technological progress.

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