Location History:
- Nirasaki, JP (2012)
- Kurokawa-gun, JP (2016)
- Miyagi, JP (2017 - 2024)
Company Filing History:
Years Active: 2012-2025
Title: **Shin Matsuura: Pioneer in Substrate Processing Technologies**
Introduction
Shin Matsuura is a distinguished inventor based in Miyagi, Japan, known for his significant contributions to substrate processing technologies. With an impressive portfolio of 15 patents, he has made a notable impact in the field of engineering and material processing.
Latest Patents
Shin Matsuura's latest innovations include two groundbreaking patents. The first, titled "Substrate Processing System and Transfer Method," presents a sophisticated substrate processing system that integrates a vacuum transfer module, plasma process module, and an innovative transfer robot. This system enhances the efficiency of substrate handling by offering two operational modes: a simultaneous transfer mode and a sole transfer mode.
The second patent, "Substrate Support and Substrate Processing Apparatus," describes a substrate support structure that features a base with a first surface for object placement and a unique design for pin members that enables precise control over the substrate during processing. This invention emphasizes Matsuura's commitment to improving substrate handling and processing techniques.
Career Highlights
Shin Matsuura is currently a key contributor at Tokyo Electron Limited, a leading company in semiconductor production equipment. His work has been pivotal in advancing technologies that are crucial for the manufacturing processes in electronics, showcasing both innovation and practical application.
Collaborations
Matsuura collaborates with renowned colleagues Jun Young Chung and Nobutaka Sasaki, who have contributed to his innovative projects. Their teamwork exemplifies the collaborative spirit within the research and development community in the field of substrate processing.
Conclusion
As an inventor, Shin Matsuura continues to push the boundaries of technology in substrate processing. His patents reflect a deep understanding of engineering principles and practical needs in the semiconductor industry. With his ongoing contributions, Matsuura stands as an influential figure shaping the future of substrate processing technologies.