The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Jun. 05, 2018
Tokyo Electron Limited, Tokyo, JP;
Shin Matsuura, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate delivery method includes receiving a substrate by protruding a plurality of pins, detecting a position of a predetermined portion of the substrate in a state where the substrate is supported by the plurality of pins, estimating a deviation amount and a deviation direction of a positional deviation between a center position of the substrate and a predetermined reference position using a detected result, tilting the substrate, and bringing the substrate into partial contact with the placing table by lowering the plurality of pins at a same speed in a state where the substrate is tilted, and disposing the substrate on the placing table while moving the center position of the substrate by the deviation amount in a direction opposite to the deviation direction by using rotation of the substrate in a vertical direction due to contact with the placing table by continuously lowering the plurality of pins.