Kawasaki, Japan

Shin-ichi Inoue


Average Co-Inventor Count = 8.8

ph-index = 2

Forward Citations = 112(Granted Patents)


Company Filing History:


Years Active: 1989-1990

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2 patents (USPTO):Explore Patents

Title: The Innovative Mind of Shin-ichi Inoue

Introduction

Shin-ichi Inoue is a prominent inventor based in Kawasaki, Japan, recognized for his significant contributions to semiconductor technology. With two patents to his name, he has developed methods that enhance the production and reliability of semiconductor devices.

Latest Patents

Inoue's latest patents include the "Method of producing a contact plug" and the "Method of selectively depositing tungsten upon a semiconductor substrate." The former outlines a process that involves forming a contact hole in an insulating layer, utilizing silicon for semiconductor material, and substituting it with tungsten through a chemical reaction with WF6 gas. This method ultimately improves the construction of semiconductor devices. The latter patent details a selective deposition process of tungsten on a silicon substrate, enabling the creation of precise aluminum wirings essential for very-large-scale integration (VLSI) technology. The innovative steps involve coating a silicon substrate, depositing tungsten, and employing a cycle of deposition and etching to ensure a flat surface for optimal fabrication.

Career Highlights

Shin-ichi Inoue's career is marked by his affiliation with Fujitsu Corporation, a leading company in technology and semiconductor solutions. His work has greatly contributed to advancements in chip manufacturing processes, which are vital for developing next-generation electronic devices.

Collaborations

Throughout his career, Shin-ichi has collaborated with notable colleagues, including Yoshimi Shioya and Yasushi Oyama. These partnerships reflect a team-oriented approach to innovation within the demanding field of semiconductor technology.

Conclusion

As an inventor, Shin-ichi Inoue continues to make strides in the semiconductor industry, showcasing the importance of innovation in advancing technology. His patents not only enhance the production techniques but also set the stage for future developments in semiconductor devices, reinforcing his status as a key contributor to the field.

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