Company Filing History:
Years Active: 2007-2009
Title: Shih-Jeun Fan: Innovator in Plasma Processing Systems
Introduction
Shih-Jeun Fan is a prominent inventor based in San Jose, CA, known for his contributions to plasma processing systems. With a total of 5 patents, he has made significant advancements in targeted data collection and recipe creation methodologies.
Latest Patents
One of his latest patents is a "Targeted data collection architecture," which provides a system designed to collect processing data in a plasma processing environment. This innovative system includes a data collection host and multiple plasma processing components equipped with sensors. Each sensor implements intelligent targeted data agents that manage data collection behavior. The communication network facilitates bi-directional communication, allowing sensors to adapt their data collection methods based on information received from the data collection host.
Another notable patent is focused on "Methods and arrangement for creating recipes using best-known methods." This method enhances the creation of recipes for substrate processing by utilizing a best-known method driven recipe editor. The editor incorporates best practice specifications, known as best-known methods (BKMs), to create a structured recipe. The process involves defining rules for parameters within BKM modules, ensuring that the recipes adhere to established best practices.
Career Highlights
Shih-Jeun Fan is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work has significantly impacted the efficiency and effectiveness of plasma processing systems.
Collaborations
Throughout his career, Shih-Jeun has collaborated with notable colleagues, including Chung-Ho Huang and Chin-Chuan Chang, who have contributed to his innovative projects.
Conclusion
Shih-Jeun Fan's work in plasma processing systems exemplifies the importance of innovation in technology. His patents reflect a commitment to advancing the field and improving processing methodologies.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.