The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2009
Filed:
Sep. 28, 2006
Chung-ho Huang, San Jose, CA (US);
Shih-jeun Fan, San Jose, CA (US);
Chin Chuan Chang, Los Altos, CA (US);
Nicolas Bright, San Jose, CA (US);
Chung-Ho Huang, San Jose, CA (US);
Shih-Jeun Fan, San Jose, CA (US);
Chin Chuan Chang, Los Altos, CA (US);
Nicolas Bright, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for affecting a creation of a recipe for processing a substrate in a processing system. The method includes providing a best-known method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which are best practice specifications for the recipe. The method also includes creating a plurality of BKM modules based on the BKMs for the recipe. The method further includes defining rules for parameters in the plurality of BKM modules. The rules are propagated by the BKMs. The methods moreover includes creating a BKM driven recipe by employing the best-known method driven recipe editor to enter values for the parameters within the guidelines of BKM rules.