Shigeru Oba

Title: Shigeru Oba - Innovator in Wafer Polishing Technology

Introduction

Shigeru Oba is a renowned inventor based in Nishigo-mura, Japan. He holds a total of three patents, showcasing his contribution to the field of wafer polishing technology. His innovative work is instrumental in enhancing the quality of silicon wafers used in various applications.

Latest Patents

Shigeru Oba's latest patents include a sizing device, a polishing apparatus, and a polishing method. The sizing device plays a crucial role in measuring the thickness of a wafer during the polishing process using laser beam interference. It consists of a light source that irradiates the wafer with a laser beam, a light-receiving portion to capture reflected light, and a calculating part designed to determine the thickness by analyzing the reflected light data. This method includes compensating for measurement errors based on the resistivity of the wafer, leading to more accurate thickness measurements.

Additionally, his method for producing mirror-polished wafers involves multiple steps, including strain removal and double-side polishing. This process is performed on a plurality of silicon wafers, resulting in wafers that exhibit high flatness and superior quality. Each step is executed through batch processing, ensuring efficiency and consistency in the production of mirror-polished wafers.

Career Highlights

Shigeru Oba is currently associated with Shin-Etsu Handotai Co., Ltd., where he continues to push the boundaries of wafer technology. His dedication has led to notable advancements in the industry, marking him as a significant figure in the field of silicon wafer processing.

Collaborations

Throughout his career, Shigeru has collaborated with distinguished colleagues, notably Kazuaki Aoki and Shiro Amagai. These collaborations have fostered a synergistic approach to innovation, enhancing the scope and effectiveness of their research and developments.

Conclusion

In summary, Shigeru Oba's contributions to the domain of wafer polishing are profound and impactful. His innovative patents reflect a commitment to improving manufacturing processes in the semiconductor industry, solidifying his reputation as a key inventor in this technology space.