Shigenobu Itoh

Title: The Innovative Contributions of Shigenobu Itoh

Introduction

Shigenobu Itoh, a distinguished inventor based in Komaki, Japan, has made significant contributions to the field of engineering with a focus on chemical liquid supply systems. With a total of three patents to his name, he has been instrumental in developing inventions that enhance efficiency and safety in industrial applications.

Latest Patents

Among his latest innovations is a **Chemical Liquid Supply System**, designed to prevent heat generation during operation in pumps. This system allows for downsizing the discharge pump used for instilling chemical liquids via a tip nozzle. By supplying compressed air to a space above a resist bottle, chemical liquids are provided with positive pressure and directed to the pump chamber, filling it with the required liquid. This innovative approach eliminates the traditional reliance on springs or other mechanisms to drive flexible membranes in discharge pumps, reducing the risk of heat damage to semiconductor wafers. The absence of electric motors further minimizes the risk of overheating, making his invention particularly advantageous.

Another notable invention is a **Pump for Supplying Chemical Liquids**. This pump features an opening at the center of the internal wall surface of the operating chamber. It employs a pin that protrudes towards the diaphragm, positioned offset from the center. When the diaphragm is deformed due to suction, part of it rides over the pin, creating a convex shape that facilitates the filling and discharge of chemical liquids. This design enhances reliability and performance during operation, showcasing Itoh's forward-thinking approach in pump technology.

Career Highlights

Itoh's career includes significant roles at reputable companies such as Octec, Inc. and CKD Corporation. His work within these organizations has allowed him to apply his expertise in practical applications, leading to innovations that have made lasting impacts on the industry.

Collaborations

Throughout his career, Shigenobu Itoh has collaborated with esteemed colleagues, including Katsuya Okumura and Kazuhiro Sugata. These partnerships have enriched his work and fostered an environment of shared knowledge and creativity, further propelling advancements in their field.

Conclusion

Shigenobu Itoh stands out as a prominent inventor, whose patents reflect a commitment to enhancing operational efficiency and safety in chemical supply systems. His innovative designs not only meet industry needs but also pave the way for future advancements in technology. As an influential figure in his field, Itoh's contributions continue to inspire and drive progress in engineering.