The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Jul. 29, 2005
Katsuya Okumura, Tokyo, JP;
Shigenobu Itoh, Komaki, JP;
Tetsuya Toyoda, Komaki, JP;
Kazuhiro Sugata, Komaki, JP;
Katsuya Okumura, Tokyo, JP;
Shigenobu Itoh, Komaki, JP;
Tetsuya Toyoda, Komaki, JP;
Kazuhiro Sugata, Komaki, JP;
Octec Inc., Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A chemical liquid supply system that prevents the generation of heat during operation in a pump and allows downsizing the discharge pump for instilling a chemical liquid from a tip nozzle. Compressed air is supplied to an upper space of a resist bottle and the chemical liquid is conferred positive pressure and sent out to a pump chamber of a discharge pump, thereby the pump chamber is filled with a resist liquid. This eliminates the need of a conventional construction where a spring or others are used to drive a flexible membrane of the discharge pump to the operation chamber side to take in the resist liquid. As a result, no electric motor is used, so there is obviously no risk of heat damage to a semiconductor wafer and the discharge pump itself can be further downsized.