Shigeki Kurihara

Title: Shigeki Kurihara: Pioneering Innovation in Semiconductor Defect Analysis

Introduction

Shigeki Kurihara, an accomplished inventor from Hitachinaka, Japan, has made significant contributions to the field of semiconductor technology. With a total of two patents to his name, he is recognized for his innovative solutions that address complex challenges in defect image processing and evaluation.

Latest Patents

Shigeki Kurihara's latest patents include a "Defect image processing apparatus" and a "Defect image processing method," alongside a "Semiconductor defect classifying apparatus" and a "Semiconductor defect classifying method." The defect image processing apparatus utilizes normalized cross-correlation to image-match a layout image acquired from design data with an image obtained after removing defect area portions from a defect image. This technology effectively displays both the layout image and the defect image on a display device, facilitating easier analysis of systematic defects that may occur due to positional relationships with different layers.

Additionally, his semiconductor defect classifying apparatus aids in determining local patterns to be evaluated. The apparatus is integrated into a pattern evaluating system that stores patterns of LSI chips as CAD data. It identifies local patterns with smaller process margins through simulation, and assists in observing these patterns in the fabrication line. A key feature includes a risk level map creation section that delineates risk areas based on process margins, along with a superimposition processing section that pinpoints local patterns within risk areas.

Career Highlights

Shigeki Kurihara has built a strong career at Hitachi High-Technologies Corporation, where he plays a vital role in semiconductor innovation. His expertise has led to advancements that not only enhance defect detection but also improve the overall efficiency of semiconductor manufacturing processes.

Collaborations

Throughout his career, Kurihara has collaborated with esteemed colleagues, including Yutaka Tandai and Tamao Ishikawa. Together, they have contributed to groundbreaking advancements in semiconductor technology and defect analysis, further solidifying their reputation in the industry.

Conclusion

Shigeki Kurihara exemplifies the spirit of innovation in the semiconductor sector. Through his patents and collaborative efforts, he has made significant strides in improving defect analysis and processing methodologies. His work has had a lasting impact on the field, paving the way for future advancements in semiconductor technology.