Shigehiro Goto

Title: Shigehiro Goto: Innovator in Vaporizing Technology

Introduction

Shigehiro Goto is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of vaporizing technology, holding a total of 12 patents. His innovative designs have advanced the efficiency and effectiveness of treating liquid vaporization processes.

Latest Patents

One of Goto's latest patents is a treating liquid vaporizing apparatus. This apparatus includes a buffer tank for storing a treating liquid, a vaporizing container connected to the buffer tank for vaporizing the treating liquid, and a further vaporizing container connected in parallel with the vaporizing container. It also features switch valves for controlling the flow paths of the treating liquid between the buffer tank and the vaporizing containers. Another notable patent is for a thermal processing apparatus and method. This invention involves a thermal processor that adjusts the temperature of an upper plate on which a substrate is placed. The system detects the temperature and calculates control values to maintain the desired temperature, ensuring optimal processing conditions.

Career Highlights

Shigehiro Goto has worked with notable companies such as Dainippon Screen Manufacturing Co., Ltd. and Screen Holdings Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the industry.

Collaborations

Throughout his career, Goto has collaborated with esteemed colleagues, including Keiji Matsuchika and Akihiko Morita. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Shigehiro Goto's contributions to vaporizing technology through his patents and collaborations highlight his role as a leading inventor in the field. His work continues to influence advancements in thermal processing and vaporization methods.