This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Sheng-Jang Liu and Semiconductor Processing Innovation.
Introduction
Sheng-Jang Liu is an inventor based in Hsinchu, Taiwan. His patent work concerns semiconductor manufacturing equipment and the use of optical measurements to control wafer positioning.
Latest Patents
Liu is associated with 1 patent: “Method of Operation of Semiconductor Processing Tool.” The invention describes using images captured in situ by one or more optical sensors to measure spacing and/or a gap between a wafer on a susceptor and a pre-heat ring. A control device uses those measurements, together with settings for the process being performed, to generate a command for a motor that moves the susceptor.
Career Highlights
Liu is associated with Taiwan Semiconductor Manufacturing Company Limited. His patent describes a measurement-based approach to controlling a semiconductor processing tool, potentially supporting more precise wafer positioning during processing.
Collaborations
Liu’s listed coworker is Yan-Chun Liu. Their shared association reflects work connected to semiconductor manufacturing and process equipment.
Conclusion
Sheng-Jang Liu’s patent focuses on optical sensing and automated susceptor movement, addressing wafer-to-ring measurements in semiconductor processing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile