Shekhar Athani

Title: Shekhar Athani: Innovator in Semiconductor Technology

Introduction

Shekhar Athani is a prominent inventor based in Bengaluru, India, known for his contributions to semiconductor technology. With a total of three patents to his name, he has made significant advancements in the field, particularly in the area of electrostatic chucks and substrate supports.

Latest Patents

One of Shekhar's latest patents is titled "Electrostatic Chuck with Improved Temperature Control." This invention provides electrostatic chucks designed to secure substrates during processing. The embodiments of this patent offer methods and apparatus for enhanced temperature control across the radial profile of the substrate. Additionally, it includes methods for controlling hydrogen concentration in processed films during a high-density plasma (HDP) process. Another notable patent is "Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor Process Chamber." This invention outlines a substrate support for use in a chemical vapor deposition (CVD) chamber, featuring a pedestal that supports a substrate and includes various components such as a rotary union, drive assembly, and RF rotary joint.

Career Highlights

Shekhar Athani is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on developing innovative solutions that enhance the efficiency and effectiveness of semiconductor processing technologies.

Collaborations

Throughout his career, Shekhar has collaborated with notable colleagues, including Jay D Pinson, II, and Hanish Kumar Panavalappil Kumarankutty. These collaborations have contributed to the advancement of technology in their field.

Conclusion

Shekhar Athani's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor. His innovations continue to shape the future of semiconductor processing.