Location History:
- Singapore, SG (2001 - 2004)
- Shanghai, CN (2003 - 2004)
Company Filing History:
Years Active: 2001-2004
Title: Innovations by Inventor Shao Kai
Introduction
Shao Kai is a prominent inventor based in Singapore, known for his contributions to the field of semiconductor technology. With a total of 6 patents to his name, he has made significant advancements in the design and manufacturing of metal-insulator-metal (MIM) capacitors.
Latest Patents
One of his latest patents is a method for forming a MIM capacitor using an organic anti-reflective coating (ARC). This innovative approach involves applying the organic ARC to enhance the performance of the MIM capacitor. The first electrode is formed from a first metal layer, followed by the application of the organic ARC, and the second electrode is created from a second metal layer. The removal of the organic ARC using a nominal clean technique leads to improved performance, including increased breakdown voltage and decreased leakage current.
Another notable patent involves a metal sandwich structure for a MIM capacitor onto dual damascene. In this process, a first and second damascene copper interconnect plug are created over a substrate's surface. A MIM capacitor is then aligned with the second damascene copper interconnect plug, achieved through a one-time etch of a stack of layers comprising tantalum (Ta), capacitor dielectric, and tantalum. This method allows for the creation of copper interconnects that are aligned with both the MIM capacitor and the second damascene interconnect plug.
Career Highlights
Shao Kai is currently employed at Chartered Semiconductor Manufacturing Ltd, where he continues to innovate in the semiconductor industry. His work has been instrumental in advancing the technology behind MIM capacitors, which are crucial components in modern electronic devices.
Collaborations
Throughout his career, Shao Kai has collaborated with notable colleagues, including Sanford Chu and Chit Hwei Ng. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Shao Kai's contributions to the field of semiconductor technology, particularly in the development of MIM capacitors, highlight his role as a leading inventor. His innovative methods and collaborative efforts continue to shape the future of electronic components.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.