Shao Beng Law

Title: Innovations by Shao Beng Law in Wafer Cleaning Technology

Introduction

Shao Beng Law is a notable inventor based in Singapore, recognized for his contributions to the field of semiconductor manufacturing. He has developed innovative methods and apparatuses that enhance the efficiency of wafer cleaning processes. His work is particularly significant in the context of the growing demand for high-quality semiconductor devices.

Latest Patents

Shao Beng Law holds a patent for an "Apparatus and methods for cleaning and drying of wafers." This invention includes a first example method and apparatus for etching and cleaning a substrate, which comprises a device with a first manifold and a second manifold. The first manifold is equipped with a plurality of nozzles designed for dispensing chemicals onto the substrate. The second manifold is connected to a vacuum source and/or a dry air/gas source. Additionally, a second example embodiment features a wafer cleaning device and method that utilizes a manifold with capillary jet nozzles and a liquid capillary jet stream to effectively clean substrates. He has 1 patent to his name.

Career Highlights

Shao Beng Law is currently employed at GlobalFoundries Singapore Pte. Ltd., where he continues to innovate in the semiconductor industry. His work focuses on improving the cleaning and drying processes of wafers, which are critical for the production of high-performance electronic components.

Collaborations

Throughout his career, Shao Beng Law has collaborated with talented professionals in the field, including Boon Meng Seah and Bei Chao Zhang. These collaborations have contributed to the advancement of technologies in wafer processing and cleaning.

Conclusion

Shao Beng Law's innovative contributions to wafer cleaning technology demonstrate his commitment to enhancing semiconductor manufacturing processes. His patent and ongoing work at GlobalFoundries Singapore Pte. Ltd. highlight the importance of innovation in the tech industry.