Shantanu Pathak

Title: Shantanu Pathak: Innovator in Ion Implantation Technology

Introduction

Shantanu Pathak is a notable inventor based in Nutley, NJ (US). He has made significant contributions to the field of ion implantation technology. His innovative work has led to the development of a unique patent that enhances the efficiency of ion implantation systems.

Latest Patents

Shantanu Pathak holds a patent for a "Workpiece handling scan arm for ion implantation system." This invention provides an ion implantation apparatus, system, and method for connecting and disconnecting a workpiece holder from a scan arm. The design includes a twist head that allows an electrostatic chuck to be mounted. Additionally, it features rotating and non-rotating members associated with dynamic electrical and fluid rotary connections. Notably, the electrostatic chuck can be removed from the twist head without disconnecting the dynamic fluid seals. This innovation is crucial for improving the functionality and reliability of ion implantation systems.

Career Highlights

Shantanu Pathak is currently employed at Axcelis Technologies, Inc., where he continues to push the boundaries of technology in his field. His work at Axcelis has positioned him as a key player in the development of advanced ion implantation solutions.

Collaborations

Shantanu has collaborated with talented coworkers such as Ari Eiriksson and Donovan Beckel. Their combined expertise contributes to the innovative environment at Axcelis Technologies.

Conclusion

Shantanu Pathak's contributions to ion implantation technology through his patent and work at Axcelis Technologies, Inc. highlight his role as a significant inventor in the industry. His innovative spirit continues to drive advancements in this critical field.