The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Aug. 17, 2007
Ari Eiriksson, Beverly, MA (US);
Donovan Beckel, Wakefield, MA (US);
Robert Mitchell, Winchester, MA (US);
Michel Pharand, San Jose, CA (US);
Marvin Lafontaine, Kingston, NH (US);
Ashwin Purohit, Gloucester, MA (US);
Steven Weed, Marblehead, MA (US);
Wayne Arseneault, Lynnfield, MA (US);
Shantanu Pathak, Nutley, NJ (US);
Joseph Daniel Foley, Swampscott, MA (US);
Ari Eiriksson, Beverly, MA (US);
Donovan Beckel, Wakefield, MA (US);
Robert Mitchell, Winchester, MA (US);
Michel Pharand, San Jose, CA (US);
Marvin LaFontaine, Kingston, NH (US);
Ashwin Purohit, Gloucester, MA (US);
Steven Weed, Marblehead, MA (US);
Wayne Arseneault, Lynnfield, MA (US);
Shantanu Pathak, Nutley, NJ (US);
Joseph Daniel Foley, Swampscott, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.